The WACCO Wafer Pre-aligner will find a precise orientation of a wafer
notch.

The model PA300C has sensing capabilities which automatically detect if
the wafer has a notch. By employing high-speed algorithm and fast CCD
sensors, it can provide the fastest cycle time.
 
¢Â Modular wafer pre-aligner with NO external dedicated controller Footprint advantage, improved wafer flow
¢Â Class 1 cleanroom compatible
¢Â Highly reliable and repeatable positioning
¢Â Fastest cycle time (High throughput)
¢Â Easy to use and install
 
Item Specifications
Dimension 210(W)x285(D)x344.8(H)
Wafer Size 200mm
Alignment Accuracy Centering : ¡¾ 0.05mm
Rotation : ¡¾ 0.05¢ª
Alignment time Within 4secs/wafer
Utility Requirement Vacuum : over 500mmHg
Input power : 24Vdc/6A
Interface RS-232C