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The WACCO Wafer Pre-aligner will find
a precise orientation of a wafer
notch.
The model PA300C
has sensing capabilities which automatically detect
if
the wafer has a notch. By employing high-speed algorithm
and fast CCD
sensors, it can provide the fastest cycle time. |
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¢Â Modular wafer pre-aligner with NO external dedicated
controller Footprint advantage, improved wafer flow
¢Â Class 1 cleanroom compatible
¢Â Highly reliable and repeatable positioning
¢Â Fastest cycle time (High throughput)
¢Â Easy to use and install |
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Item |
Specifications |
Dimension |
210(W)x285(D)x344.8(H) |
Wafer Size |
200mm |
Alignment Accuracy |
Centering : ¡¾ 0.05mm
Rotation : ¡¾ 0.05¢ª |
Alignment time |
Within 4secs/wafer |
Utility Requirement |
Vacuum : over 500mmHg
Input power : 24Vdc/6A |
Interface |
RS-232C |
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