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The WACCO Wafer Alignment Stage will find a precise
orientation of a wafernotch.
The model AS20300C has sending capabilities which
automatically detect if the wafer has a notch(or flat).
By employing high-algorithm and fast CCD sensor,
it can procide the fastest cycletime. |
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| ◈ Modular wafer pre-aligner with NO extemal dedicated controller
Footprint advantage, improved wafer flow
◈ Class 1 clean room compatible
◈ Highly reliable and repeatable positioning
◈ Fastest cycle time (high throughput)
◈ Easy to use and install |
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| Item |
Specifications |
| Dimension(WxDxH) |
700(W)x700(D)x254(H) |
| Wafer Size |
200mm, 300mm |
| Alignment Accuracy |
Centering : ± 0.01mm
Rotation : ± 0.05˚ |
| Axis Repeatability |
Within ± 1um |
| Alignment time(with out wafer loading time) |
Within 2.5 sec/wafer |
| Utility requirement |
Vacuum : over 500 mmHg
Input power : 24Vdc/5A |
| Interface |
RS-232C |
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