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Laser Mark Reader´Â HostÀÇ ¸í·É¿¡ µû¶ó WaferÀÇ
ID¸¦ ÆǺ°ÇÏ¿© ¿øÇÏ´Â
À§Ä¡ÀÇ FOUPÀ¸·Î Wafer¸¦ ÀÌÀçÇÏ´Â ÀåÄ¡ÀÌ´Ù.
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IDÀÇ Marking À§Ä¡¿¡ (Front Side, Back Side, Angle) ±¸¾Ö¹ÞÁö ¾Ê°í ÀÐÀ» ¼ö ÀÖ°Ô Çϱâ À§ÇØ OCR ModuleÀ»
3ÃàÀ¸·Î ¡¡
À̵¿µÇµµ·Ï FlexibleÇÏ°Ô ¼³°è.
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ºü¸£°í Á¤È®ÇÑ OCR ±â´ÉÀ» ±â¹ÝÀ¸·Î Mixing lot °ËÃâ, Laser Marking½Ã Character Missing ¿©ºÎ °ËÃâ
CharacterÀÇ ½ÉÇÑ
¡¡ ÈѼտ¡ ÀÇÇÑ OCR ½ÇÆÐ µîÀ» °ËÃâ °¡´É.
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»ç¿ëÀÚ°¡ ½±°Ô »ç¿ëÇÒ ¼ö ÀÖ´Â GUI·Î ±¸¼ºµÇ¸ç, °¢Á¾ Error Logging ¹× Self Diagnosis¿¡ ÀÇÇÑ Error °ËÃâÀ»
ÇÒ ¼ö ÀÖÀ¸¸ç
¡¡ Error ¹ß»ý ½Ã Operator¿¡°Ô Case º°·Î ÀûÀýÇÑ ´ëÀÀ ¹æ¹ýÀ» Screen »ó¿¡ Á¦½ÃÇÔÀ¸·Î½á ½Å¼ÓÇÏ°Ô ÀÛ¾÷À¸·ÎÀÇ º¹±Í°¡ °¡´É.
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°¢ ºÎºÐ ÇÙ½É ModuleÀ» ÀÌ·Â °ü¸®ÇÔÀ¸·Î½á ¹®Á¦ ¹ß»ý ½Ã ÃßÀûÀÌ °¡´É.
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CompactÇÑ Moving Pass¸¦ ±¸¼ºÇÔÀ¸·Î½á ThroughputÀÌ ±Ø´ëÈ µÇµµ·Ï ¼³°è.
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SEMI Standard ¹× »ç¿ëÀÚÀÇ ¾ÈÁ¤¼ºÀ» °í·ÁÇÑ Compact Load / Unlaod Port äÅÃ.
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Mini-environment¸¦ ¼³Ä¡ÇÔÀ¸·Î½á Class 10ÀÇ È¯º®ÇÑ Particle control °¡´É.
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ESD(Electro static discharge)·ÎºÎÅÍÀÇ ¾ÈÀü¼ºÀ» °í·ÁÇÑ ¼³°è.
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Description |
Specification |
Dimension (W x D x H) |
¡¡ 1439 x 1204 x 1850mm |
Utility |
Electric
Power |
¡¡ 1P,
220V/60Hz, 2.5Kw |
Vacuum |
¡¡ £¾500mmHg |
Air Pressure |
¡¡ £¾ 5 Bar |
Performance |
Handling Wafer |
¡¡ 12¡± |
Throughput |
¡¡ £¾106 Wafers/Hr |
Lord/Unload Port |
¡¡ FOUP Opener : 2Ports |
Transfer Robot |
¡¡ Edge Grip & Single Arm Type
4Ãà Robot : 1´ë |
OCR |
¡¡ Cognex»ç In-Sight 1701 : 2´ë (Front
/ Back Side) |
BCR |
¡¡ FOUP Opener : Keyence BL-601HASO(7099)
¡¡ Manual¿ë Handy Barcode Reader : 1´ë |
Pre Aligner |
¡¡ Edge Grip Type : 1´ë |
Buffer Arm |
¡¡ Edge Grip Type : 1´ë |
Environment |
¡¡ FFU / lonizer bar
¡¡ Cleanliness : Class 10 @ 0.1§ |
Host Communication |
¡¡ TCP/IP Port and SECS/GEM for Host
Grading |
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