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| The WACCO Wafer pre-Aligner will find a precise orientation of a wafer notch. The model LPA10150 has sensing capabilities which automatically detect if the wafer has a notch (or flat). By employing high-speed algorithm and fast CCD sensors, it can provide the fastest cycle time.
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◈ Modular wafer pre-aligner with NO external dedicated controller
◈ Class 1 clean room compatible
◈ Highly reliable and repeatable positioning
◈ Fastest cycle time ( High throughput )
◈ Easy to use and install
◈ Option : Buffer ( Using I - FORK )
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| Item |
Specification |
| Wafer size |
100mm, 150mm |
| Wafer material |
Glass Wafer, Silicon Wafer |
| Alignment accuracy |
Centering : ±0.01 mm
Rotation : ±0.05 ° |
| Axis Repeatability |
Within ±1um |
| Alignment time(with out wafer loading time) |
Within 2.5 sec/wafer |
| Utility requirement |
Vacuum : over 500 mmHg
Input power : 24Vdc/5A |
| Interface |
RS-232C |
| Dimension(W x D x H) |
Unit |
230 x 245 x 155mm |
| Extern Controller |
130 x 230 x 98mm |
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